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sinzi yasima
sinzi yasima
Oxide
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Semiconductor device fabrication
Optoelectronics
Semiconductor device
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Method for manufacturing a substrate processing apparatus and a semiconductor device
2011
tokusin akao
unryuu ogawa
zhengjiuaoye
sinzi yasima
jun si umekawa
kaitirou minami
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29aA19P インバータ式多相交流電源を用いたプラズマ生成とその応用(プラズマ応用)
2006
ryouiti ebara
koudai ikeda
kazunori matumoto
kenzi nagai
hirosi zi simizu
seizi oda
sinzi yasima
yuuzi tikurin
itigyou toyoda
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被吸着体脱離方法、静電チャック、及びプラズマ処理装置
1997
Shinji Yashima
sinzi yasima
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