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L. A. Wills
L. A. Wills
Agilent Technologies
Capacitor
Electronic engineering
Ferroelectricity
Electrode
Ferroelectric capacitor
3
Papers
41
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Hydrogen-Robust Submicron IrOx/PZT/Ir Capacitors for Embedded Ferroelectric Memory
2000
The Japan Society of Applied Physics
Tomoyuki Sakoda
Theodore S. Moise
Scott R. Summerfelt
Luigi Colombo
G. Xing
Stephen R. Gilbert
Alvin Leng Sun Loke
S. Ma
R. Kavari
L. A. Wills
J. Amano
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Citations (1)
Electrical properties of submicron (/spl ges/0.13 /spl mu/m/sup 2/) Ir/PZT/Ir capacitors formed on W plugs
1999
IEDM | International Electron Devices Meeting
Theodore S. Moise
Scott R. Summerfelt
G. Xing
Luigi Colombo
Tomoyuki Sakoda
Stephen R. Gilbert
Alvin Leng Sun Loke
S. Ma
R. Kavari
L. A. Wills
T. Hsu
Jun Amano
Stephen T. Johnston
Daniel J. Vestyck
Michael W. Russell
Steven M. Bilodeau
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Citations (5)
1