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R. Kavari

Agilent Technologies

6

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157

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Hydrogen-Robust Submicron IrOx/Pb(Zr, Ti)O3/Ir Capacitors for Embedded Ferroelectric Memory

2001 Japanese Journal of Applied Physics
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Hydrogen-Robust Submicron IrOx/PZT/Ir Capacitors for Embedded Ferroelectric Memory

2000 The Japan Society of Applied Physics
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Electrical properties of submicron (/spl ges/0.13 /spl mu/m/sup 2/) Ir/PZT/Ir capacitors formed on W plugs

1999 IEDM | International Electron Devices Meeting
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Microstructure and reliability of copper interconnects

1998 IEEE Transactions on Electron Devices
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Citations (72)