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siratani masazi

Kyushu University

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高移動度アモルファスIn2O3:Sn薄膜作製におけるN2/Arスパッタリングプラズマ中の窒素原子絶対密度計測

2015
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4. Coagulation and Transport of Fine Particles in Processing Plasmas( Advances in Various Fields of "Plasma and Dust Particles")

2011 Journal of Plasma and Fusion Research
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Growth Kinetics of Particles in GeH_4 and SiH_4 rf Plasmas

1997 PST | Conference on Privacy, Security and Trust
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気相中微粒子の粒径・密度・屈折率の超高感度レーザ偏光散乱その場測定法の開発

1994
- siratani masazi
- Shiratani Masaharu
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