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Growth Kinetics of Particles in GeH_4 and SiH_4 rf Plasmas
Growth Kinetics of Particles in GeH_4 and SiH_4 rf Plasmas
1997
kawasaki hitosi sei
Kawasaki Hiroharu
Ohkura Hiroshi
ookura hirosi
Kida Junichirou
Mutianchunyi Lang
fukuzawa tuyosi
Fukuzawa Tsuyoshi
siratani masazi
Shiratani Masaharu
watanabe ikuo
Watanabe Yukio
Keywords:
Internet privacy
Atomic physics
Computer science
Plasma
Kinetics
growth kinetics
Computer security
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