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Greg Hebner
Greg Hebner
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Ensemble de verrouillage cylindrique à indication d'état
2015
Subbiah Gopalakrishnan
Kevin Earl David
Kenton Hayes Barker
Shell Bieker
Daniel J. Compton
Brandon Robinson
Snehil Solanki
Greg Hebner
Bill Massey
Samir M. Tamer
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Frequency dependent spatial distributions of the electrons in a 300 mm diameter VHF capacitively coupled plasmas
2005
Bulletin of the American Physical Society
Greg Hebner
E. V. Barnat
Paul Miller
Alex Paterson
John Holland
Thorston Lill
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