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Kuang-Han Ke
Kuang-Han Ke
Analytical chemistry
Chemistry
Dielectric
Wafer
Optics
4
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40
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Magnetic field optimization in a dielectric magnetically enhanced reactive ion etch reactor to produce an instantaneously uniform plasma
1998
Journal of Vacuum Science and Technology
Roger Alan Lindley
Claes Bjorkman
H Shan
Kuang-Han Ke
Kenny L. Doan
Richard R. Mett
Mike Welch
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Citations (19)
MxP+: A new dielectric etcher with enabling technology, high productivity, and low cost‐of‐consumables
1996
Journal of Vacuum Science & Technology B
Hongching Shan
Evans Lee
Michael J. Welch
Bryan Pu
James D. Carducci
Kuang-Han Ke
Hua Gao
Paul E. Luscher
Gerard Crean
Rynn Wang
Richard Blume
James Cooper
Robert W. Wu
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Citations (9)
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