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huangyazhengshiye
huangyazhengshiye
Materials science
Resist
Composite material
Polymer
Pulmonary surfactant
3
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The photoresist composition and the resist pattern forming method for dry exposure
2011
Akimasa Soyano
huangyazhengshiye
Hiroshi Tomioka
hirosi tomioka
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hp32nm以降のArF液浸DP用 Freezing 技術
2009
katuhiko hieda
kenzi seiko
takeo sioya
yufuanye
tomohiro kakizawa
masafumi hori
huangyazhengshiye
kou iti fuziwara
atusi nakamura
makoto sugiura
keiiti yamaguti
tutomu simokawa
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