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Rémy Berthelon
Rémy Berthelon
Physics
Humanities
Radio frequency
Germanium
Annealing (metallurgy)
2
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2
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Enabling UTBB Strained SOI Platform for Co-integration of Logic and RF: Implant-Induced Strain Relaxation and Comb-like Device Architecture
2020
VLSIT | Symposium on VLSI Technology
Chen Sun
Jie Liang
Haiwen Xu
Eugene Y.-J. Kong
Bich-Yen Nguyen
Anne Vandooren
Walter Schwarzenbach
Christophe Maleville
V. Barral
Rémy Berthelon
Olivier Weber
Franck Arnaud
Aaron Thean
Xiao Gong
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Strain integration and performance optimization in sub-20nm FDSOI CMOS technology
2018
Rémy Berthelon
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