Old Web
English
Sign In
Acemap
>
authorDetail
>
Ben Shieh
Ben Shieh
Stanford University
Electronic engineering
Dielectric
Air gap (plumbing)
Interconnection
Materials science
7
Papers
132
Citations
0.01
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Reliability Studies on Multilevel Interconnection with Intermetal Dielectric Air Gaps
2001
Microelectronics Reliability
Valeriy Sukharev
Ben Shieh
Ratan K. Choudhury
Chong W. Park
Krishna C. Saraswat
Show All
Source
Cite
Save
Citations (6)
Air gaps lower k of interconnect dielectrics
1999
Solid State Technology
Ben Shieh
Krishna C. Saraswat
Michael D. Deal
J.P. McVittie
Show All
Source
Cite
Save
Citations (17)
Integration and reliability issues for low capacitance air-gap interconnect structures
1998
IITC | International Interconnect Technology Conference
Ben Shieh
Lori C. Bassman
Deok-kee Kim
Krishna C. Saraswat
Michael D. Deal
J.P. McVittie
Richard Scott List
S. Nag
L. Ting
Show All
Source
Cite
Save
Citations (13)
Simulation of the Effect of Dielectric Air Gaps on Interconnect Reliability
1997
Lori C. Bassman
Richard P. Vinci
Ben Shieh
Deok-kee Kim
J.P. McVittie
Krishna C. Saraswat
Michael D. Deal
Show All
Source
Cite
Save
Citations (6)
1