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Reliability Studies on Multilevel Interconnection with Intermetal Dielectric Air Gaps
Reliability Studies on Multilevel Interconnection with Intermetal Dielectric Air Gaps
2001
Valeriy Sukharev
Ben Shieh
Ratan K. Choudhury
Chong W. Park
Krishna C. Saraswat
Keywords:
Electronic engineering
Engineering
Dielectric
Air gap (plumbing)
Interconnection
Correction
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