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T. Theel
T. Theel
Schrödinger
Sputter deposition
Sputtering
Analytical chemistry
Materials science
Thin film
4
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301
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Phase separation in magnetron sputtered superhard BCN thin films
1998
Diamond and Related Materials
S. Ulrich
H. Ehrhardt
T. Theel
J. Schwan
S. Westermeyr
M. Scheib
P. Becker
H. Oechsner
G. Dollinger
A. Bergmaier
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Citations (64)
Magnetron-sputtered superhard materials
1997
Surface & Coatings Technology
S. Ulrich
T. Theel
J. Schwan
H. Ehrhardt
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Citations (94)
Low-temperature formation of β-silicon carbide
1997
Diamond and Related Materials
S. Ulrich
T. Theel
J. Schwan
V. Batori
M. Scheib
H. Ehrhardt
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Citations (43)
Stress-induced formation of high-density amorphous carbon thin films
1997
Journal of Applied Physics
J. Schwan
S. Ulrich
T. Theel
H. Roth
H Ehrhardt
P. Becker
S. R. P. Silva
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Citations (100)
1