Old Web
English
Sign In
Acemap
>
authorDetail
>
Kotaro Ooishi
Kotaro Ooishi
Suction
Nozzle
Resist
Engineering
Mechanical engineering
4
Papers
5
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Application of PGSD (proximity gap suction development) to 70 nm NAND mask fabrication
2005
Hideaki Sakurai
Tooru Shibata
Masamitsu Itoh
Kotaro Ooishi
Hideo Funakoshi
Yoshiki Okamoto
Shigemi Oono
Masatoshi Kaneda
Shigenori Kam
Naoya Hayashi
Show All
Source
Cite
Save
Citations (0)
Novel Resist Development System for Photomasks
2002
Masamitsu Itoh
Hideaki Sakurai
Yukihiko Esaki
Kotaro Ooishi
Kazuo Sakamoto
Show All
Source
Cite
Save
Citations (0)
Performance of Proximity Gap Suction Development (PGSD)
2002
Hideaki Sakurai
Masamitsu Itoh
Yukihiko Esaki
Kotaro Ooishi
Kazuo Sakamoto
Mika Nakao
Toshiharu Nishimura
Hiroyuki Miyashita
Naoya Hayashi
Show All
Source
Cite
Save
Citations (1)
1