Old Web
English
Sign In
Acemap
>
authorDetail
>
W.S. Linderiberger
W.S. Linderiberger
Bell Labs
Engineering
Electronic engineering
Dry etching
Shield
Breakdown voltage
1
Papers
4
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Submicron Mechanically Planarized Shallow Trench Isolation With Field Shield
1991
VLSIT | Symposium on VLSI Technology
W.S. Linderiberger
A. Kornblit
W.Y.C. Lai
S.J. Hillenius
Min-Liang Chen
Show All
Source
Cite
Save
Citations (4)
1