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Submicron Mechanically Planarized Shallow Trench Isolation With Field Shield
Submicron Mechanically Planarized Shallow Trench Isolation With Field Shield
1991
W.S. Linderiberger
A. Kornblit
W.Y.C. Lai
S.J. Hillenius
Min-Liang Chen
Keywords:
Engineering
Electronic engineering
Dry etching
Shield
Breakdown voltage
Shallow trench isolation
Resist
Silicon
Dielectric
Fabrication
Correction
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