author-photo

T. Moreno

University of Paris-Sud

3

Papers

9

Citations

Citation Trend

Filter By

Papers (2) Sort By

Journal Conference Others

Performance of Etched Laminar Multilayer Gratings in the Soft X-ray Region

1992 Journal of Modern Optics
Show All
- Source
- Cite
- Save
Citations (7)
Application of e‐beam lithography and reactive ion etching to the fabrication of masks for projection x‐ray lithography

1991 Journal of Vacuum Science & Technology B
Show All
- Source
- Cite
- Save
Citations (0)