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Tony Joung
Tony Joung
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Wavelength
Optoelectronics
Materials science
Process variation
2
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2
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0
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2024
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Process monitoring and control with tunable wavelength overlay coupled with simulation-to-measurement analysis
2019
Pedro Herrera
Kun Gao
Chen Dror
Eitan Hajaj
Alon A. Volfman
Raviv Yohanan
Vidya Ramanathan
Victoria Naipak
Renan Milo
Tal Yaziv
Nir BenDavid
Meng Wang
Hao Mei
Weihua Li
Xindong Gao
Dongyue Yang
Cheuk Wun Wong
Karsten Gutjahr
Xueli Hao
Tony Joung
Md. Motasim Bellah
DeNeil Park
Yue Zhou
Abhishek Gottipati
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Process drift compensation by tunable wavelength homing in scatterometry-based overlay
2019
Kun Gao
Pedro Herrera
Vidya Ramanathan
Victoria Naipak
Meng Wang
Renan Milo
Tal Yaziv
Nir BenDavid
Chen Dror
Hao Mei
Weihua Li
Xindong Gao
Linfei Gao
Motasim Bellah
Karsten Gutjahr
Dongyue Yang
Cheuk Wun Wong
Xueli Hao
Tony Joung
DeNeil Park
Yue Zhou
Abhishek Gottipati
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Citations (1)
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