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Sing-Pin Tay

15

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226

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UV-Enhanced Oxynitridation of Silicon Substrates

2004
- Sing-Pin Tay
- Yao Zhi-hu
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Erratum: “Monitoring and purging dynamics of trace gaseous impurity in atmospheric pressure rapid thermal process” [J. Vac. Sci. Technol. A 21, 676 (2003)]

2003 Journal of Vacuum Science and Technology
- Yao Zhi-hu
- Sing-Pin Tay
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Monitoring and purging dynamics of trace gaseous impurity in atmospheric pressure rapid thermal process

2003 Journal of Vacuum Science and Technology
- Yao Zhi-hu
- Sing-Pin Tay
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Fast heat-treatment system for integrated circuits

2002
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Effect of ramp rate on the C49 to C54 titanium disilicide phase transformation from Ti and Ti(Ta)

2000 Journal of Vacuum Science & Technology B
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Spectroscopic ellipsometry investigation of silicide formation by rapid thermal process

1999 Journal of Vacuum Science & Technology B
- Yaozhi Hu
- Sing-Pin Tay
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Transistor Characteristics with Ta O Gate Dielectric

1998 IEEE Electron Device Letters
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SPECTROSCOPIC ELLIPSOMETRY INVESTIGATION OF NICKEL SILICIDE FORMATION BY RAPID THERMAL PROCESS

1998 Journal of Vacuum Science and Technology
- Yaozhi Hu
- Sing-Pin Tay
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Residual Gases and Their Influence on Processes in the Atmospheric Rapid Thermal Processing Equipment

1998 MRS Proceedings
- Yao Zhi-hu
- Sing-Pin Tay
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Transistor characteristics with Ta/sub 2/O/sub 5/ gate dielectric

1998 IEEE Electron Device Letters
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Citations (94)