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J. Borrel

STMicroelectronics

7

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Composition of Carbon Clusters in Implanted Silicon Using Atom Probe Tomography.

2021 Microscopy and Microanalysis
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Low temperature carbon co-implantation in silicon: Defects suppression and diffusion modeling

2021 Journal of Applied Physics
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Pre-Amorphization Implants and in-situ Surface Preparation Optimization for Low Co-Silicided Area Density

2019 IWJT | International Workshop on Junction Technology
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3D atomic-scale investigation of carbon segregation in phosphorus co-implanted silicon

2019 Applied Physics Letters
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Prevention of Temperature-Induced Dewetting of Implanted SOI via Heated Ion Implantation

2018
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