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C.A. de Meijere
C.A. de Meijere
ASML Holding
Ion
Atomic physics
Plasma
Hydrogen
Extreme ultraviolet lithography
6
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49
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An atomic hydrogen etching sensor for H2 plasma diagnostics
2021
Review of Scientific Instruments
D. P. J. van Leuken
C.A. de Meijere
R. M. van der Horst
Vadim Yevgenyevich Banine
Ea Osorio
J Job Beckers
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Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas
2019
Applied Physics Letters
J Job Beckers
Tijn van de Ven
C.A. de Meijere
Ruud van der Horst
M. van Kampen
Vadim Yevgenyevich Banine
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Citations (5)
Analysis of retarding field energy analyzer transmission by simulation of ion trajectories
2018
Review of Scientific Instruments
T.H.M. van de Ven
C.A. de Meijere
R. M. van der Horst
M. van Kampen
Vadim Yevgenyevich Banine
J Job Beckers
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Citations (12)
Ion fluxes and energies increase with pressure in EUV-induced H2 plasmas
2016
T.H.M. van de Ven
P. Reefman
C.A. de Meijere
Ruud van der Horst
Vadim Yevgenyevich Banine
J Job Beckers
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