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D. P. J. van Leuken
D. P. J. van Leuken
ASML Holding
Amorphous carbon
Ion
Heat flux sensor
Carbon
Etching (microfabrication)
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An atomic hydrogen etching sensor for H2 plasma diagnostics
2021
Review of Scientific Instruments
D. P. J. van Leuken
C.A. de Meijere
R. M. van der Horst
Vadim Yevgenyevich Banine
Ea Osorio
J Job Beckers
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