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T. Kokubo
T. Kokubo
IMEC
Materials science
Copper interconnect
Electronic engineering
Spin-½
Spin coating
2
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2
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Dual damascene patterning for full spin-on stack of porous low-K material
2002
IITC | International Interconnect Technology Conference
Yukiko Furukawa
T. Kokubo
Herbert Struyf
Mireille Maenhoudt
Serge Vanhaelemeersch
D. Gravesteijn
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Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop
2002
IITC | International Interconnect Technology Conference
T. Kokubo
Arabinda Das
Yukiko Furukawa
Ingrid Vos
Francesca Iacopi
Herbert Struyf
Joke Van Aelst
Mireille Maenhoudt
Zsolt Tokei
Iwan Vervoort
Hugo Bender
Michele Stucchi
Marc Schaekers
Werner Boullart
M. Van Hove
Serge Vanhaelemeersch
W. Peterson
A. Shiota
Karen Maex
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