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Greg Thomes
Greg Thomes
Particle
Composite material
Wafer
Aerosol
Nitrogen
2
Papers
8
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Advanced cryogenic aerosol cleaning: application to damagefree cleaning of sensitive structured wafers
2005
ASMC | Advanced Semiconductor Manufacturing Conference
Jeffrey M. Lauerhaas
James F. Weygand
Greg Thomes
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Citations (8)
Aging Effects in Test Silicon Wafers Prepared for Wafer Cleaning Process Evaluation
2002
Natraj Narayanswami
Greg Thomes
James Weygand
Jeffery W. Butterbaugh
Seong Ho Yoo
Benjamin Liu
Dennis F. Paul
Juergen Scherer
Lawrence Davis
Kenton D. Childs
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