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Natraj Narayanswami
Natraj Narayanswami
FSI International, Inc.
Particle
Composite material
Metallurgy
Materials science
Wafer
5
Papers
16
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Aging Effects in Test Silicon Wafers Prepared for Wafer Cleaning Process Evaluation
2002
Natraj Narayanswami
Greg Thomes
James Weygand
Jeffery W. Butterbaugh
Seong Ho Yoo
Benjamin Liu
Dennis F. Paul
Juergen Scherer
Lawrence Davis
Kenton D. Childs
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Particle Removal Efficiency Evaluation at 40 nm Using Haze Particle Standard
2001
Solid State Phenomena
Seong-Ho Yoo
Benjamin Y. H. Liu
James Sun
Natraj Narayanswami
Gregory P. Thomes
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Citations (8)
Identification and sizing of particle defects in semiconductor-wafer processing
2001
Journal of Vacuum Science & Technology B
Seong Ho Yoo
James Weygand
Juergen Scherer
Lawrence Davis
Benjamin Liu
Kurt K. Christenson
Jeffery W. Butterbaugh
Natraj Narayanswami
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Citations (3)
Dynamics of Mass Transfer on a Wafer Surface in Ozonated-Water Processing for Photoresist Removal
1998
Solid State Phenomena
Natraj Narayanswami
S. Nelson
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Citations (1)
a Numerical Investigation of the Interaction Between Crossing Oblique Shocks and a Turbulent Boundary Layer
1992
Natraj Narayanswami
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Citations (4)
1