Old Web
English
Sign In
Acemap
>
authorDetail
>
Kohmura Kazuo
Kohmura Kazuo
Engineering
Extreme ultraviolet lithography
Manufacturing engineering
Search engine
Operations management
4
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
A THIN BONDING MATERIAL FOR HIGH DENSITY HETEROGENEOUS INTEGRATION
2020
Kayaba Yasuhisa
Nakamura Yuzo
Kamada Jun
Kozeki Takashi
Kohmura Kazuo
Show All
Source
Cite
Save
Citations (0)
ペリクル膜、ペリクル枠体、ペリクル、その製造方法、露光原版、露光装置、半導体装置の製造方法
2017
Ono Yosuke
ono yousuke
Okubo Atsushi
ookubo atusi
Kohmura Kazuo
takamura kazuo
Sekiguchii Atsuko
sekiguti takako
Kato Yuichi
katou yuuiti
Yamada Takeo
yamada takeo
Show All
Source
Cite
Save
Citations (0)
Development of a novel closed EUV pellicle for EUVL manufacturing
2016
Ono Yosuke
Kohmura Kazuo
Okubo Atsushi
Taneichi Daiki
Ishikawa Hisako
Biyajima Tsuneaki
Show All
Source
Cite
Save
Citations (0)
Development of a novel closed EUV pellicle for EUVL manufacturing
2016
Ono Yosuke
Kohmura Kazuo
Okubo Atsushi
Taneichi Daiki
Ishikawa Hisako
Biyajima Tsuneaki
Show All
Source
Cite
Save
Citations (0)
1