Old Web
English
Sign In
Acemap
>
authorDetail
>
Joren Wouters
Joren Wouters
Calibration
Optoelectronics
Lithography
Extreme ultraviolet lithography
Materials science
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Calibration of a MOx-specific EUV photoresist lithography model
2020
Craig D. Needham
Amrit K. Narasimhan
Ulrich Welling
Lawrence S. Melvin
Peter De Schepper
Joren Wouters
Joren Severi
Danilo De Simone
Stephen T. Meyers
Show All
Source
Cite
Save
Citations (0)
1