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Christin Bartsch
Christin Bartsch
GlobalFoundries
Materials science
Analytical chemistry
Copper
Corrosion inhibitor
Galvanic corrosion
2
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6
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Electrical property improvements of ultra low-k ILD using a silylation process feasible for process integration.
2011
IITC | International Interconnect Technology Conference
Oszinda Thomas
Matthias Schaller
Lukas Gerlich
Daniel Fischer
Susanne Leppack
Christin Bartsch
Stefan Schulz
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Citations (4)
Development of compatible wet-clean stripper for integration of CoWP metal cap in Cu/low-k interconnects
2010
Microelectronic Engineering
Aiping Wu
Eugene C. Baryschpolec
Madhukar Bhaskara Rao
Matthias Schaller
Christin Bartsch
Susanne Leppack
Andreas Ott
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Citations (2)
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