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N. Sato
N. Sato
Tokyo Electron
Electronic engineering
RC time constant
Interconnection
Silicate
Transistor
2
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Advanced Air Gap Formation Scheme Using Volatile Material
2021
IITC | International Interconnect Technology Conference
H. Warashina
Hiroaki Kawasaki
Hiroyuki Nagai
T. Yamaguchi
N. Sato
Yuuki Kikuchi
X. Sun
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Gas Phase Pore Stuffing for the protection of organo-silicate glass dielectric materials
2018
ISSM | International Symposium on Semiconductor Manufacturing
M. Fujikawa
J.-F. de Marneffe
R. Chanson
K.Babaei Gavan
A. Rezvanov
Frederic Lazzarino
Zsolt Tokei
T. Yamaguchi
S. Nozawa
N. Sato
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