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Zexin Fan
Zexin Fan
Peking University
Composite material
Materials science
Etching
Fabrication
Flexural strength
5
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2
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0
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A dual-parameter on-chip test platform based on thermal actuator for testing fracture strength of microstructure
2018
ICSICT | IEEE International Conference on Solid-State and Integrated Circuit Technology
Zikun Chen
Zexin Fan
Fang Yang
Longzhao Shi
Dacheng Zhang
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A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness
2018
NEMS | Nano/Micro Engineered and Molecular Systems
Taotao Guan
Fang Yang
Wei Wang
Peng Liu
Zexin Fan
Leijian Cheng
Zikun Chen
Runze Yu
Qiancheng Zhao
Dacheng Zhang
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A thermal actuated test platform for in situ evaluating the tensile fracture strength of micro-structures
2017
EDSSC | International Conference on Electron Devices and Solid-State Circuits
Zexin Fan
Taotao Guan
Leijian Cheng
Fang Yang
Dacheng Zhang
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A universal structure for self-aligned in situ on-chip micro tensile fracture strength test
2017
MEMS | International Conference on Micro Electro Mechanical Systems
Rui Li
Fang Yang
Jun He
Li Zhang
Taotao Guan
Zexin Fan
Leijian Cheng
Dacheng Zhang
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A high-resolution non-contact thickness test method of ultra-thin silicon diaphragm
2017
TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
Taotao Guan
Fang Yang
Wei Wang
Boyan Jiang
Peng Liu
Li Zhang
Rui Li
Zexin Fan
Leijian Cheng
Q. C. Zhao
Dacheng Zhang
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