A thermal actuated test platform for in situ evaluating the tensile fracture strength of micro-structures

This paper presents a in situ on-chip micro tensile fracture strength tester, which is based on a thermal actuated test platform. In this test platform, tensile fracture strength could be extracted and process could be evaluated, there are two samples with same layout but fabricated under different process conditions were evaluated through this test platform and the results showed that this test platform has an outstanding ability to evaluate the tensile fracture strength and thus monitor the process quality.