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Takeshi Kaminatsui
Takeshi Kaminatsui
Analytical chemistry
Capacitively coupled plasma
Chemistry
Pulsed DC
RF power amplifier
2
Papers
23
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Ion energy control in reactive ion etching using 1-MHz pulsed-DC square-wave-superimposed 100-MHz RF capacitively coupled plasma
2016
Journal of Vacuum Science and Technology
Akio Ui
Hisataka Hayashi
Itsuko Sakai
Takeshi Kaminatsui
Tokuhisa Ohiwa
Katsumi Yamamoto
Keisuke Kikutani
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H2/N2 plasma damage on porous dielectric SiOCH film evaluated by in situ film characterization and plasma diagnostics
2011
Journal of Applied Physics
Hiroshi Yamamoto
Keigo Takeda
Kenji Ishikawa
Masafumi Ito
Makoto Sekine
Masaru Hori
Takeshi Kaminatsui
Hisataka Hayashi
Itsuko Sakai
Tokuhisa Ohiwa
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Citations (23)
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