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Martti Palokangas
Martti Palokangas
Silicon on insulator
Wafer
Materials science
Optoelectronics
Electronic engineering
5
Papers
8
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Residual stresses at cavity corners in silicon-on-insulator bonded wafers
2013
Journal of Micromechanics and Microengineering
T. W. Lin
O. Elkhatib
J Makinen
Martti Palokangas
Harley T Johnson
Gavin P. Horn
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Citations (4)
Direct Bonding of Oxidized Cavity Wafers
2008
Martti Palokangas
James Dekker
K. Henttinen
Jari Mäkinen
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Citations (2)
Processing and recombination lifetime characterization of silicon microstrip detectors
2002
Nuclear Instruments and Methods in Physics Research
Marko Yli-Koski
Martti Palokangas
Victor Ovchinnikov
P. Heikkilä
Jaakko Härkönen
Eija Tuominen
K. Lassila-Perini
L. Palmu
S. Kallijärvi
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Ensemble de propulsion
1998
Kari Laukia
Rurik Nyman
Martti Palokangas
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