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Ph. Helin
Ph. Helin
Katholieke Universiteit Leuven
Materials science
Electronic engineering
Polycrystalline silicon
Capacitive sensing
Capacitive micromachined ultrasonic transducers
4
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A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss
2019
PS | International Conference on Photonics in Switching
Ph. Helin
Andrea Firrincieli
A. Ray Chaudhuri
Nga P. Pham
Silvia Lenci
Manuel Mannarino
Haris Osman
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A wafer-level poly-sige-based thin film packaging technology demonstrated on a soi-based high-Q MEM resonator
2011
TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
Ph. Helin
Agnes Verbist
J. De Coster
Bin Guo
Simone Severi
Ann Witvrouw
L. Haspeslagh
H.A.C. Tilmans
Y. Naito
K. Nakamura
K. Onishi
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Citations (5)
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