A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss

This paper reports state-of-the-art values for a 200mm LPCVD silicon nitride platform in terms of layer thickness control; 1nm for a silicon nitride thickness of 400nm with low propagation loss 0.13dB/cm at 1520nm.