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Bong-Soo Kang
Bong-Soo Kang
Samsung
X-ray lithography
Photolithography
Process window
Optical proximity correction
Nanotechnology
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Model-based searching method to find the integrated critical failure on the wafer
2012
Proceedings of SPIE
Bong-Soo Kang
No-Young Chung
Hyung-Kwan Park
Suk-joo Lee
Ja-hum Ku
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