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Sarah L. Grunow
Sarah L. Grunow
Materials science
Manufacturing engineering
Process optimization
Wafer
Artificial intelligence
2
Papers
6
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Wafer Scale Cu Plating Process Optimization for Defectivity Improvement
2014
Shafaat Ahmed
Qiang Huang
Tien Cheng
Paul Findeis
Craig R Gruszecki
Andrew H. Simon
P. McLaughlin
Naftali E. Lustig
Edward Engbrecht
Mark N Lakritz
Pei I Wang
Christa L Montgomery
S. Mittal
F. Baumann
Connie-Nga Truong
Brett Baker-ONeal
Sarah L. Grunow
Michael P. Chudzik
Stephan Grunow
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Integration Solutions for 65 nm Back End of Line Defect Reduction and Manufacturability
2007
Habib Hichri
Jennifer S. Oakley
Sarah L. Grunow
Christine Bunke
J. Kelp
Rui Fang
Deepak Kulkarni
Matthew Angyal
T. Houghton
A. Santiago
Kaushik A. Kumar
C. Majors
John A. Fitzsimmons
Henry A. Nye
David Watts
J. Mazzotti
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Citations (6)
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