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Jick M. Yu
Jick M. Yu
Intel
Electromigration
Sputter deposition
Sputtering
Chemical vapor deposition
Electroplating
1
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9
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Copper interconnection deposition techniques and integration
1996
VLSIT | Symposium on VLSI Technology
Gang Bai
N. Cox
Sychyi Fang
Donald S. Gardner
Anne Sauter Mack
T. Marieb
Xiao-Chun Mu
Vicky Ochoa
R. Villasol
Jick M. Yu
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Citations (9)
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