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C. Y. Rang
C. Y. Rang
University of Texas at Austin
High-κ dielectric
Nitrogen
Dielectric
Boron
Crystallization
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Effects of NH 3 Annealing on High-k HfSiON/HfO 2 Gate Stack Dielectrics
2003
H-J Cho
C. Y. Rang
C. S. Kang
Y. H. Kim
R. Choi
A. Shahriar
C. H. Choi
S. J. Rhee
J. C. Lee
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