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A. Sanz-Hervás

Technical University of Madrid

35

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Combined assessment of piezoelectric AlN films using X-ray diffraction, infrared absorption and atomic force microscopy

2007 Diamond and Related Materials
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Effect of rapid thermal annealing on the crystal quality and the piezoelectric response of polycrystalline AlN films

2006 Thin Solid Films
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AlN-on-Si SAW filters: influence of film thickness, IDT geometry and substrate conductivity

2005 IUS | Internaltional Ultrasonics Symposium
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Assessment of the piezoelectric response of sputtered A1N films by x-ray diffraction

2005 IUS | Internaltional Ultrasonics Symposium
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The role of Ge predeposition temperature in the MBE epitaxy of SiC on Ssilicon

2004 Physica Status Solidi (c)
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SAW characteristics of AlN films sputtered on silicon substrates.

2004 Ultrasonics
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Influence of the Ge Coverage Prior to Carbonization on the Structure of SiC Grown on Si(111)

2004 Materials Science Forum
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Influence of oxygen and argon on the crystal quality and piezoelectric response of AlN sputtered thin films

2004 Diamond and Related Materials
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Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications

2004 Sensors and Actuators A-physical
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High energy ion characterization of sputtered AlN thin films

2003 Diamond and Related Materials
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Citations (7)