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Hideki Tomioka
Hideki Tomioka
Hitachi
Analytical chemistry
Chemistry
Lithography
Resist
Thin film
7
Papers
29
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2024
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Film formation by motion control of ionized precursors in electric field
1999
Applied Physics Letters
Motoaki Adachi
Toshiyuki Fujimoto
Koichi Nakaso
Kikuo Okuyama
Frank G. Shi
Hideki Sato
Toshio Ando
Hideki Tomioka
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Citations (12)
A new reliability problem associated with Ar ion sputter cleaning of interconnect vias
1989
IRPS | International Reliability Physics Symposium
Hideki Tomioka
Shinichi Tanabe
Koichiro Mizukami
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Citations (7)
Shorter-wavelength lithography utilizing MRS-type negative resists
1983
Microelectronic Engineering
Toshiharu Matsuzawa
Takao Iwayanagi
Hidehito Obayashi
Hideki Tomioka
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Citations (1)
Deep UV Projection Lithography Using Novel Negative Resist
1981
VLSIT | Symposium on VLSI Technology
Hidehito Obayashi
Toshiharu Matsuzawa
Takao Iwayanagi
Hiroshi Yanazawa
Saburo Nonogaki
Hideki Tomioka
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Deep UV 1:1 projection lithography utilizing negative resist MRS
1981
IEEE Transactions on Electron Devices
Toshiharu Matsuzawa
Hideki Tomioka
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Citations (9)
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