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Ken Mr. Buckmann
Ken Mr. Buckmann
Intel
Engineering
Dry etching
Isotropy
Aperture
Phase-shift mask
3
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2024
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Development of an automated multiple-target mask CD disposition system to enable new sampling strategy
2006
Jian Ma
Jeff Farnsworth
Larry Bassist
Ying Cui
Bobby Mammen
Ramaswamy Padmanaban
Venkatesh Nadamuni
Muralidhar Kamath
Ken Mr. Buckmann
Julie Neff
Phil Freiberger
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Technological challenges in implementation of alternating phase-shift mask
2001
W. Tsai
Qi-De Qian
Ken Mr. Buckmann
Wen-Hao Cheng
Long He
Brian Irvine
Marilyn Kamna
Yulia O. Korobko
Michael Kovalchick
Steven M. Labovitz
R.Talevi
Jeff Farnsworth
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Technological challenges in implementation of alternating Phase Shift Mask
2001
W. Tsai
Qi-De Qian
Ken Mr. Buckmann
Wen-Hao Cheng
Long He
Brian Irvine
Marilyn Kamna
Yulia O. Korobko
Michael Kovalchick
Steven M. Labovitz
R.Talevi
Jeff Farnsworth
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1