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Keiya Saitoh
Keiya Saitoh
Optics
Ion beam
Analytical chemistry
Photon counting
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End-point detection using focused ion beam-excited photoemissions in milling deep small holes in large scale integrated circuit structures
1998
Journal of Vacuum Science & Technology B
Hiroshi Yamaguchi
Keiya Saitoh
Michinobu Mizumura
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