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Michinobu Mizumura

7

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18

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Trial Manufacturing of Thin-Film Transistor by Selective Laser Annealing with Micro Lens

2016 The Review of Laser Engineering
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Pulsed Laser System with Variable Pulse Duration for Laser Annealing

2013 The Review of Laser Engineering
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Pulsed Laser System with Variable Pulse Duration for Laser Annealing (レーザー学会創立40周年記念)

2013 The Review of Laser Engineering
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Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

2003 Journal of Applied Physics
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Dry Etching of Organic Low Dielectric Constant Film without Etch Stop Layer : Nuclear Science, Plasmas, and Electric Discharges

2002 Japanese Journal of Applied Physics
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End-point detection using focused ion beam-excited photoemissions in milling deep small holes in large scale integrated circuit structures

1998 Journal of Vacuum Science & Technology B
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Citations (7)