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Ryuuichirou Kamimura
Ryuuichirou Kamimura
Materials science
Dry etching
Composite material
Etching
Reactive-ion etching
2
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2024
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[The 42nd JSAP Paper Award Speech] Development of high-efficiency and high-power deep-UV LED using reflective photonic crystal
2020
The Japan Society of Applied Physics
Yukio Kashima
Eriko Matsuura
Noritoshi Maeda
Masafumi Jo
Hidetoshi Shinohara
Ryuuichirou Kamimura
Yamato Osada
Kanji Furuta
Takeshi Iwai
Aoyama Yohei
Iwaisako Yasushi
Tumugu Nagano
Hideki Hirayama
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Development of Dry etching process for high-performance Piezoelectric MEMS Device
2016
The Japan Society of Applied Physics
Tadashi Yamamoto
Hiroki Kobayashi
Takehito Jimbo
Ryuuichirou Kamimura
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