Old Web
English
Sign In
Acemap
>
Paper
>
Development of Dry etching process for high-performance Piezoelectric MEMS Device
Development of Dry etching process for high-performance Piezoelectric MEMS Device
2016
Tadashi Yamamoto
Hiroki Kobayashi
Takehito Jimbo
Ryuuichirou Kamimura
Keywords:
Dry etching
Composite material
Etching
Reactive-ion etching
Microelectromechanical systems
Materials science
Piezoelectricity
Optoelectronics
piezoelectric mems
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]