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kazuyuki mae toko
kazuyuki mae toko
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Materials science
Photomask
Optics
Phase shift module
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Mask blank, as well as the manufacturing method and the manufacturing method of a photomask of the mask blank
2002
kazuyuki mae toko
teruhiko kumada
atuko fuzino
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Process for producing a phase shifter film, the method of manufacturing a phase shift mask blank, and a method of manufacturing a phase shift mask
1999
kazuyuki mae toko
nobuyuki yosioka
mae kawada
akihiko toku
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位相シフタ膜の製造方法、位相シフトマスク用ブランクスの製造方法、および、位相シフトマスクの製造方法
1999
kazuyuki mae toko
nobuyuki yosioka
mae kawada
akihiko toku
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位相シフトフォトマスクブランクス、位相シフトフォトマスク、及びそれらの製造方法。
1995
akihiko isao
Atsushi Hayashi
Akihiko Isao
Susumu Kawada
Kazuyuki Maedoko
Nobuyuki Yoshioka
kazuyuki mae toko
nobuyuki yosioka
mae kawada
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