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Takashi Okagawa
Takashi Okagawa
Renesas Electronics
Aerial image
Interference (wave propagation)
Immersion lithography
Refractive index
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Approximation of in-resist image by aerial image with 1/n-times shorter wavelength
2004
Shuji Nakao
Jun Abe
Takashi Okagawa
Akira Imai
Hidehiko Kozawa
Akira Tokui
Kouichirou Tsujita
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