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T. Hayashi
T. Hayashi
Kanazawa Institute of Technology
Sputtering
Sputter deposition
Thin film
Polyimide
Analytical chemistry
2
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20
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Imidized organic thin films deposited on glass substrates
2001
Thin Solid Films
Kazuhiro Fukushima
Y Ikeda
T. Hayashi
Naoto Kikuchi
Eiji Kusano
Akira Kinbara
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Citations (16)
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