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Beibei Ge
Beibei Ge
IFS AB
Optoelectronics
Atomic layer deposition
Silicon nitride
Beam (structure)
Materials science
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Low Temperature Neutral Beam Enhanced Atomic Layer Deposition of Silicon Nitride
2020
The Japan Society of Applied Physics
HuaHsuan Chen
Beibei Ge
Daisuke Ohori
Tomohiro Kubota
Dai Ishikawa
Seiji Samukawa
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