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Low Temperature Neutral Beam Enhanced Atomic Layer Deposition of Silicon Nitride
Low Temperature Neutral Beam Enhanced Atomic Layer Deposition of Silicon Nitride
2020
HuaHsuan Chen
Beibei Ge
Daisuke Ohori
Tomohiro Kubota
Dai Ishikawa
Seiji Samukawa
Keywords:
Optoelectronics
Atomic layer deposition
Silicon nitride
Beam (structure)
Materials science
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